主要规格及技术指标 |
高分辨冷场发射扫描电镜主机(包括真空系统、电子光学系统、检测器系统),检测器包括Upper和Lower两个二次电子探测器,背散射电子检测器。另外,配备CL检测器(GATAN,Monarc Pro)、无窗能谱仪(牛津,Ultim Max100)。 一、SE分辨率:0.6nm@15Kv(工作距离4mm);0.7nm@1Kv(工作距离1.5mm,减速模式) 二、BSE分辨率:3nm@15Kv(工作距离8mm) 三、能谱仪能量分辨率:Mn分辨率优于127eV;F分辨率优于64Kv;C分辨率优于56eV。 四、CL光谱分辨率:优于0.2nm(12001p/mm光栅,P标准样品)。最高取谱速度:6000s/s。光谱探测范围PMT:185-980nm。光谱探测范围CCD:200nm-1100nm。分光光路狭缝可调范围:0.01mm-10mm。
The high-resolution cold-field emission scanning electron microscope host (including vacuum system, electron-optical system, detector system), the detector includes two secondary electron detectors, Upper and Lower, and a backscattered electron detector. In addition, it is equipped with a CL detector (GATAN, Monarc Pro), a windowless spectrometer (Oxford, Ultim Max100). 1. SE resolution: 0.6nm@15Kv (working distance 4mm); 0.7nm@1Kv (working distance 1.5mm, deceleration mode) 2. BSE resolution: 3nm@15Kv (working distance 8mm) 3. energy resolution of energy spectrometer: Mn resolution better than 127eV; F resolution is better than 64Kv; C resolution is better than 56eV. 4. CL spectral resolution: better than 0.2 nm (12001p/mm grating, P standard sample). Maximum score acquisition speed: 6000s/s. Spectral detection range PMT: 185-980nm. Spectral detection range CCD: 200nm-1100nm. Adjustable range of splitting optical path slit: 0.01mm-10mm
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